Electron probe microanalysis of light elements: Improvements in the measurement and signal extraction methods

Quantitative electron probe microanalysis (EPMA) by wavelength dispersive spectrometry of light elements is a significant challenge due to difficulties signal extraction for low intensities. Therefore, good choice measurement parameters and suitable treatment, accurate background description interference correction are crucial. For elements, peak ratios (P/B) can easily approach unity special care needs be paid the setting pulse height analyser (PHA) avoid noise contribution emission peak. Furthermore, may have high curvature classical linear fit no longer valid. This work investigates EPMA from Be F with aim determine best experimentation (dispersive element, accelerating voltage, PHA). It also provides detailed information about shifts, broadening influence different fits on quantification. In total, 25 samples containing were analysed Monte Carlo simulations carried out. These show that X-ray intensity element's characteristic line increased working voltages around 5 kV. PHA should used in automatic differential or integral mode. Our shows third degree polynomial describes better than an exponential function. Consequently overestimation P/B values leading large quantification errors avoided. paper database position full width at half maximum, as well enlargement materials various compositions.